pwiDB

Plasma-Surface Interaction Data Set 238

Sputtering of Ar⁺ on V(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on V(pc) at 300 K

angle = 0.0 deg	E /eV	P
	29.8	3.472e-33
	35.17	0.000223
	41.5	0.001177
	48.98	0.003567
	57.81	0.008581
	68.23	0.01808
	80.52	0.03469
	95.03	0.06166
	112.2	0.1021
	132.4	0.1577
	156.2	0.2273
	184.4	0.3071
	217.6	0.3918
	256.8	0.4765
	303.1	0.5584
	357.7	0.6365
	422.1	0.711
	498.2	0.7828
	588.0	0.8527
	694.0	0.9218
	819.0	0.9904
	966.6	1.059
	1141.0	1.128
	1346.0	1.197
	1589.0	1.267
	1875.0	1.336
	2213.0	1.405
	2612.0	1.473
	3083.0	1.54
	3638.0	1.606
	4294.0	1.67
	5068.0	1.731
	5981.0	1.789
	7058.0	1.843
	8330.0	1.893
	9832.0	1.938
	11600.0	1.977
	13690.0	2.009
	16160.0	2.035
	19070.0	2.053
	22510.0	2.062
	26570.0	2.063
	31360.0	2.055
	37010.0	2.037
	43670.0	2.009
	51540.0	1.972
	60830.0	1.925
	71790.0	1.87
	84730.0	1.806

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2139
q = 5.277
mu = 1.927
epsilonL = 1.139e-05
Eth = 29.8

Fit range

E = 29.8 – 100000