{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "V", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on V(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2139, "q": 5.277, "mu": 1.927, "epsilonL": 1.139e-05, "Eth": 29.8}, "E_min": 29.8, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
29.8	3.472e-33	
35.17	0.000223	
41.5	0.001177	
48.98	0.003567	
57.81	0.008581	
68.23	0.01808	
80.52	0.03469	
95.03	0.06166	
112.2	0.1021	
132.4	0.1577	
156.2	0.2273	
184.4	0.3071	
217.6	0.3918	
256.8	0.4765	
303.1	0.5584	
357.7	0.6365	
422.1	0.711	
498.2	0.7828	
588.0	0.8527	
694.0	0.9218	
819.0	0.9904	
966.6	1.059	
1141.0	1.128	
1346.0	1.197	
1589.0	1.267	
1875.0	1.336	
2213.0	1.405	
2612.0	1.473	
3083.0	1.54	
3638.0	1.606	
4294.0	1.67	
5068.0	1.731	
5981.0	1.789	
7058.0	1.843	
8330.0	1.893	
9832.0	1.938	
11600.0	1.977	
13690.0	2.009	
16160.0	2.035	
19070.0	2.053	
22510.0	2.062	
26570.0	2.063	
31360.0	2.055	
37010.0	2.037	
43670.0	2.009	
51540.0	1.972	
60830.0	1.925	
71790.0	1.87	
84730.0	1.806	
-----