pwiDB

Plasma-Surface Interaction Data Set 237

Sputtering of Ne⁺ on V(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on V(pc) at 300 K

angle = 0.0 deg	E /eV	P
	23.16	0.0
	27.47	0.0004789
	32.59	0.002423
	38.66	0.007124
	45.86	0.01661
	54.4	0.03362
	64.54	0.06119
	76.56	0.1015
	90.82	0.1543
	107.7	0.2166
	127.8	0.2835
	151.6	0.3504
	179.9	0.4142
	213.4	0.4739
	253.1	0.5297
	300.3	0.5824
	356.2	0.6328
	422.6	0.6816
	501.3	0.7294
	594.7	0.7764
	705.5	0.8229
	836.9	0.8689
	992.8	0.9142
	1178.0	0.9586
	1397.0	1.002
	1657.0	1.044
	1966.0	1.084
	2332.0	1.122
	2767.0	1.158
	3282.0	1.191
	3894.0	1.22
	4619.0	1.246
	5480.0	1.267
	6501.0	1.284
	7712.0	1.296
	9148.0	1.301
	10850.0	1.301
	12870.0	1.295
	15270.0	1.282
	18120.0	1.263
	21490.0	1.238
	25500.0	1.206
	30250.0	1.168
	35880.0	1.125
	42560.0	1.077
	50490.0	1.025
	59900.0	0.9706
	71060.0	0.9135
	84300.0	0.8551

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1444
q = 3.329
mu = 1.866
epsilonL = 2.84e-05
Eth = 23.16

Fit range

E = 23.16 – 100000