{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "V", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on V(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1444, "q": 3.329, "mu": 1.866, "epsilonL": 2.84e-05, "Eth": 23.16}, "E_min": 23.16, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
23.16	0.0	
27.47	0.0004789	
32.59	0.002423	
38.66	0.007124	
45.86	0.01661	
54.4	0.03362	
64.54	0.06119	
76.56	0.1015	
90.82	0.1543	
107.7	0.2166	
127.8	0.2835	
151.6	0.3504	
179.9	0.4142	
213.4	0.4739	
253.1	0.5297	
300.3	0.5824	
356.2	0.6328	
422.6	0.6816	
501.3	0.7294	
594.7	0.7764	
705.5	0.8229	
836.9	0.8689	
992.8	0.9142	
1178.0	0.9586	
1397.0	1.002	
1657.0	1.044	
1966.0	1.084	
2332.0	1.122	
2767.0	1.158	
3282.0	1.191	
3894.0	1.22	
4619.0	1.246	
5480.0	1.267	
6501.0	1.284	
7712.0	1.296	
9148.0	1.301	
10850.0	1.301	
12870.0	1.295	
15270.0	1.282	
18120.0	1.263	
21490.0	1.238	
25500.0	1.206	
30250.0	1.168	
35880.0	1.125	
42560.0	1.077	
50490.0	1.025	
59900.0	0.9706	
71060.0	0.9135	
84300.0	0.8551	
-----