pwiDB

Plasma-Surface Interaction Data Set 236

Sputtering of N⁺ on V(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of N⁺ on V(pc) at 300 K

angle = 0.0 deg	E /eV	P
	18.47	0.0
	22.01	0.0001172
	26.23	0.0007714
	31.26	0.002704
	37.25	0.007267
	44.4	0.01665
	52.91	0.03379
	63.06	0.06138
	75.15	0.09998
	89.56	0.1466
	106.7	0.196
	127.2	0.2433
	151.6	0.2862
	180.7	0.3244
	215.3	0.359
	256.6	0.391
	305.8	0.4212
	364.5	0.4502
	434.4	0.4785
	517.7	0.5062
	617.0	0.5334
	735.3	0.56
	876.4	0.5858
	1044.0	0.6108
	1245.0	0.6346
	1483.0	0.6572
	1768.0	0.6781
	2107.0	0.6973
	2511.0	0.7143
	2993.0	0.7288
	3567.0	0.7407
	4251.0	0.7496
	5066.0	0.7552
	6037.0	0.7573
	7195.0	0.7556
	8575.0	0.7501
	10220.0	0.7406
	12180.0	0.7272
	14520.0	0.7098
	17300.0	0.6888
	20620.0	0.6643
	24570.0	0.6368
	29280.0	0.6067
	34900.0	0.5745
	41590.0	0.5407
	49570.0	0.506
	59080.0	0.4708
	70410.0	0.4356
	83910.0	0.401

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2801
q = 1.936
mu = 2.184
epsilonL = 4.624e-05
Eth = 18.47

Fit range

E = 18.47 – 100000