{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "V", "surface_phase": "pc", "species": {"text": "N+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of N+ on V(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2801, "q": 1.936, "mu": 2.184, "epsilonL": 4.624e-05, "Eth": 18.47}, "E_min": 18.47, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
18.47	0.0	
22.01	0.0001172	
26.23	0.0007714	
31.26	0.002704	
37.25	0.007267	
44.4	0.01665	
52.91	0.03379	
63.06	0.06138	
75.15	0.09998	
89.56	0.1466	
106.7	0.196	
127.2	0.2433	
151.6	0.2862	
180.7	0.3244	
215.3	0.359	
256.6	0.391	
305.8	0.4212	
364.5	0.4502	
434.4	0.4785	
517.7	0.5062	
617.0	0.5334	
735.3	0.56	
876.4	0.5858	
1044.0	0.6108	
1245.0	0.6346	
1483.0	0.6572	
1768.0	0.6781	
2107.0	0.6973	
2511.0	0.7143	
2993.0	0.7288	
3567.0	0.7407	
4251.0	0.7496	
5066.0	0.7552	
6037.0	0.7573	
7195.0	0.7556	
8575.0	0.7501	
10220.0	0.7406	
12180.0	0.7272	
14520.0	0.7098	
17300.0	0.6888	
20620.0	0.6643	
24570.0	0.6368	
29280.0	0.6067	
34900.0	0.5745	
41590.0	0.5407	
49570.0	0.506	
59080.0	0.4708	
70410.0	0.4356	
83910.0	0.401	
-----