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Plasma-Surface Interaction Data Set 235

Sputtering of 4He+ on V(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on V(pc) at 300 K

angle = 0.0 deg E /eV P
29.090.0
34.350.0004825
40.560.001675
47.890.003794
56.550.007094
66.780.01174
78.850.01769
93.10.02464
109.90.03211
129.80.03955
153.30.04654
181.00.05284
213.70.05837
252.30.06316
297.90.06727
351.80.0708
415.40.07382
490.50.0764
579.20.07857
683.90.08036
807.50.08177
953.50.08281
1126.00.08348
1329.00.08376
1570.00.08364
1853.00.08313
2188.00.0822
2584.00.08088
3051.00.07915
3603.00.07705
4254.00.0746
5023.00.07183
5931.00.06878
7003.00.0655
8270.00.06204
9765.00.05844
11530.00.05477
13610.00.05107
16080.00.0474
18980.00.04378
22410.00.04026
26460.00.03687
31250.00.03364
36900.00.03057
43570.00.02769
51440.00.025
60740.00.0225
71720.00.02019
84690.00.01807

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 29.09 – 100000