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Plasma-Surface Interaction Data Set 234

Sputtering of 3He+ on V(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on V(pc) at 300 K

angle = 0.0 deg E /eV P
34.45.79e-23
40.480.0001664
47.640.0005056
56.060.001073
65.960.00196
77.620.003278
91.340.005154
107.50.00771
126.50.01103
148.80.01513
175.10.0199
206.10.02516
242.50.03061
285.40.03597
335.80.04098
395.20.04547
465.00.04936
547.20.05263
644.00.0553
757.80.05742
891.70.05903
1049.00.06018
1235.00.06091
1453.00.06125
1710.00.06121
2012.00.06082
2368.00.06009
2786.00.05905
3279.00.05771
3858.00.05609
4540.00.05421
5342.00.05212
6286.00.04984
7398.00.0474
8705.00.04485
10240.00.04222
12050.00.03955
14180.00.03687
16690.00.03421
19640.00.03161
23110.00.02908
27200.00.02665
32010.00.02434
37660.00.02214
44320.00.02008
52150.00.01816
61370.00.01637
72220.00.01472
84980.00.0132

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 34.4 – 100000