{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "V", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on V(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.5942, "q": 0.159, "mu": 1.234, "epsilonL": 0.0002147, "Eth": 34.4}, "E_min": 34.4, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
34.4	5.79e-23	
40.48	0.0001664	
47.64	0.0005056	
56.06	0.001073	
65.96	0.00196	
77.62	0.003278	
91.34	0.005154	
107.5	0.00771	
126.5	0.01103	
148.8	0.01513	
175.1	0.0199	
206.1	0.02516	
242.5	0.03061	
285.4	0.03597	
335.8	0.04098	
395.2	0.04547	
465.0	0.04936	
547.2	0.05263	
644.0	0.0553	
757.8	0.05742	
891.7	0.05903	
1049.0	0.06018	
1235.0	0.06091	
1453.0	0.06125	
1710.0	0.06121	
2012.0	0.06082	
2368.0	0.06009	
2786.0	0.05905	
3279.0	0.05771	
3858.0	0.05609	
4540.0	0.05421	
5342.0	0.05212	
6286.0	0.04984	
7398.0	0.0474	
8705.0	0.04485	
10240.0	0.04222	
12050.0	0.03955	
14180.0	0.03687	
16690.0	0.03421	
19640.0	0.03161	
23110.0	0.02908	
27200.0	0.02665	
32010.0	0.02434	
37660.0	0.02214	
44320.0	0.02008	
52150.0	0.01816	
61370.0	0.01637	
72220.0	0.01472	
84980.0	0.0132	
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