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Plasma-Surface Interaction Data Set 232

Sputtering of D+ on V(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on V(pc) at 300 K

angle = 0.0 deg E /eV P
42.772.766e-30
50.16.195e-05
58.70.0002669
68.760.0006986
80.560.001473
94.380.002716
110.60.004516
129.50.006857
151.70.009579
177.80.01241
208.30.01507
244.00.01737
285.80.01923
334.90.02065
392.30.02171
459.60.02245
538.50.02294
630.80.02323
739.00.02334
865.80.02329
1014.00.02311
1188.00.0228
1392.00.02238
1631.00.02185
1911.00.02122
2238.00.0205
2622.00.01971
3072.00.01885
3599.00.01794
4216.00.01698
4940.00.01601
5787.00.01501
6779.00.01402
7942.00.01304
9305.00.01207
10900.00.01113
12770.00.01023
14960.00.009366
17530.00.008548
20530.00.007776
24060.00.007054
28180.00.006381
33020.00.005757
38680.00.005181
45310.00.004653
53090.00.00417
62190.00.003729
72860.00.003329
85360.00.002966

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 42.77 – 100000