{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "V", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of D+ on V(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.6688, "q": 0.0606, "mu": 1.698, "epsilonL": 0.0004514, "Eth": 42.77}, "E_min": 42.77, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
42.77	2.766e-30	
50.1	6.195e-05	
58.7	0.0002669	
68.76	0.0006986	
80.56	0.001473	
94.38	0.002716	
110.6	0.004516	
129.5	0.006857	
151.7	0.009579	
177.8	0.01241	
208.3	0.01507	
244.0	0.01737	
285.8	0.01923	
334.9	0.02065	
392.3	0.02171	
459.6	0.02245	
538.5	0.02294	
630.8	0.02323	
739.0	0.02334	
865.8	0.02329	
1014.0	0.02311	
1188.0	0.0228	
1392.0	0.02238	
1631.0	0.02185	
1911.0	0.02122	
2238.0	0.0205	
2622.0	0.01971	
3072.0	0.01885	
3599.0	0.01794	
4216.0	0.01698	
4940.0	0.01601	
5787.0	0.01501	
6779.0	0.01402	
7942.0	0.01304	
9305.0	0.01207	
10900.0	0.01113	
12770.0	0.01023	
14960.0	0.009366	
17530.0	0.008548	
20530.0	0.007776	
24060.0	0.007054	
28180.0	0.006381	
33020.0	0.005757	
38680.0	0.005181	
45310.0	0.004653	
53090.0	0.00417	
62190.0	0.003729	
72860.0	0.003329	
85360.0	0.002966	
-----