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Plasma-Surface Interaction Data Set 231

Sputtering of H+ on V(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on V(pc) at 300 K

angle = 0.0 deg E /eV P
79.711.331e-31
92.22.958e-05
106.70.0001311
123.40.0003448
142.70.0007223
165.10.001312
190.90.002135
220.90.003157
255.50.004287
295.50.005401
341.90.006394
395.40.007205
457.40.007823
529.10.008267
612.00.008563
708.00.008742
818.90.008826
947.30.008835
1096.00.008781
1268.00.008674
1466.00.008522
1696.00.00833
1962.00.008104
2269.00.007847
2625.00.007563
3036.00.007258
3512.00.006936
4063.00.006599
4700.00.006253
5436.00.005902
6288.00.005549
7274.00.005198
8414.00.004851
9733.00.004513
11260.00.004184
13020.00.003867
15060.00.003564
17430.00.003275
20160.00.003002
23320.00.002745
26970.00.002503
31200.00.002278
36090.00.002069
41740.00.001876
48290.00.001697
55850.00.001533
64610.00.001382
74740.00.001245
86450.00.001119

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 79.71 – 100000