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Plasma-Surface Interaction Data Set 230

Sputtering of Xe+ on Ti(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe+ on Ti(pc) at 300 K

angle = 0.0 deg E /eV P
39.640.0
46.519.343e-05
54.570.000476
64.030.001409
75.130.003338
88.150.006989
103.40.01349
121.40.0245
142.40.04229
167.10.0696
196.10.1093
230.00.1634
269.90.2324
316.70.3148
371.60.4072
436.00.5058
511.60.6074
600.30.7098
704.30.8125
826.40.9155
969.71.02
1138.01.125
1335.01.234
1566.01.346
1838.01.462
2157.01.583
2530.01.708
2969.01.839
3484.01.974
4088.02.114
4796.02.259
5628.02.408
6603.02.56
7748.02.717
9091.02.875
10670.03.036
12520.03.198
14690.03.361
17230.03.523
20220.03.684
23720.03.842
27830.03.996
32660.04.146
38320.04.289
44960.04.425
52760.04.553
61900.04.67
72640.04.775
85230.04.867

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 39.64 – 100000