pwiDB

Plasma-Surface Interaction Data Set 229

Sputtering of Kr⁺ on Ti(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Ti(pc) at 300 K

angle = 0.0 deg	E /eV	P
	30.98	3.791e-39
	36.53	2.991e-05
	43.08	0.0002064
	50.8	0.000744
	59.91	0.002057
	70.65	0.004911
	83.32	0.01064
	98.25	0.02144
	115.9	0.0405
	136.6	0.07182
	161.1	0.1191
	190.0	0.1838
	224.1	0.2635
	264.2	0.3526
	311.6	0.4448
	367.5	0.5355
	433.3	0.6229
	511.0	0.7072
	602.6	0.7896
	710.7	0.8715
	838.1	0.9541
	988.3	1.038
	1165.0	1.125
	1374.0	1.214
	1621.0	1.307
	1911.0	1.402
	2254.0	1.501
	2658.0	1.602
	3134.0	1.706
	3696.0	1.812
	4359.0	1.919
	5140.0	2.028
	6062.0	2.138
	7149.0	2.247
	8430.0	2.356
	9941.0	2.463
	11720.0	2.569
	13830.0	2.671
	16300.0	2.769
	19230.0	2.863
	22670.0	2.951
	26740.0	3.031
	31530.0	3.105
	37180.0	3.169
	43850.0	3.223
	51710.0	3.266
	60980.0	3.297
	71910.0	3.315
	84800.0	3.319

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.4445
q = 8.488
mu = 2.269
epsilonL = 3.45e-06
Eth = 30.98

Fit range

E = 30.98 – 100000