{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ti", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Kr+ on Ti(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4445, "q": 8.488, "mu": 2.269, "epsilonL": 3.45e-06, "Eth": 30.98}, "E_min": 30.98, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
30.98	3.791e-39	
36.53	2.991e-05	
43.08	0.0002064	
50.8	0.000744	
59.91	0.002057	
70.65	0.004911	
83.32	0.01064	
98.25	0.02144	
115.9	0.0405	
136.6	0.07182	
161.1	0.1191	
190.0	0.1838	
224.1	0.2635	
264.2	0.3526	
311.6	0.4448	
367.5	0.5355	
433.3	0.6229	
511.0	0.7072	
602.6	0.7896	
710.7	0.8715	
838.1	0.9541	
988.3	1.038	
1165.0	1.125	
1374.0	1.214	
1621.0	1.307	
1911.0	1.402	
2254.0	1.501	
2658.0	1.602	
3134.0	1.706	
3696.0	1.812	
4359.0	1.919	
5140.0	2.028	
6062.0	2.138	
7149.0	2.247	
8430.0	2.356	
9941.0	2.463	
11720.0	2.569	
13830.0	2.671	
16300.0	2.769	
19230.0	2.863	
22670.0	2.951	
26740.0	3.031	
31530.0	3.105	
37180.0	3.169	
43850.0	3.223	
51710.0	3.266	
60980.0	3.297	
71910.0	3.315	
84800.0	3.319	
-----