pwiDB

Plasma-Surface Interaction Data Set 228

Sputtering of Ti⁺ on Ti(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ti⁺ on Ti(pc) at 300 K

angle = 0.0 deg	E /eV	P
	24.36	0.0
	28.86	0.0001316
	34.21	0.0005841
	40.54	0.001595
	48.04	0.003568
	56.93	0.007143
	67.46	0.01328
	79.95	0.02335
	94.74	0.03914
	112.3	0.0627
	133.1	0.09597
	157.7	0.1402
	186.9	0.1951
	221.4	0.2589
	262.4	0.3289
	311.0	0.4017
	368.5	0.475
	436.7	0.5471
	517.6	0.6175
	613.4	0.6862
	726.9	0.7536
	861.4	0.8203
	1021.0	0.8865
	1210.0	0.9526
	1434.0	1.019
	1699.0	1.085
	2013.0	1.152
	2386.0	1.218
	2827.0	1.284
	3351.0	1.35
	3971.0	1.414
	4706.0	1.478
	5577.0	1.539
	6609.0	1.598
	7832.0	1.653
	9281.0	1.705
	11000.0	1.753
	13030.0	1.796
	15450.0	1.834
	18310.0	1.865
	21690.0	1.89
	25710.0	1.907
	30460.0	1.916
	36100.0	1.916
	42780.0	1.907
	50700.0	1.889
	60090.0	1.861
	71210.0	1.824
	84380.0	1.778

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.3217
q = 4.901
mu = 1.693
epsilonL = 8.482e-06
Eth = 24.36

Fit range

E = 24.36 – 100000