{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ti", "surface_phase": "pc", "species": {"text": "Ti+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ti+ on Ti(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3217, "q": 4.901, "mu": 1.693, "epsilonL": 8.482e-06, "Eth": 24.36}, "E_min": 24.36, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
24.36	0.0	
28.86	0.0001316	
34.21	0.0005841	
40.54	0.001595	
48.04	0.003568	
56.93	0.007143	
67.46	0.01328	
79.95	0.02335	
94.74	0.03914	
112.3	0.0627	
133.1	0.09597	
157.7	0.1402	
186.9	0.1951	
221.4	0.2589	
262.4	0.3289	
311.0	0.4017	
368.5	0.475	
436.7	0.5471	
517.6	0.6175	
613.4	0.6862	
726.9	0.7536	
861.4	0.8203	
1021.0	0.8865	
1210.0	0.9526	
1434.0	1.019	
1699.0	1.085	
2013.0	1.152	
2386.0	1.218	
2827.0	1.284	
3351.0	1.35	
3971.0	1.414	
4706.0	1.478	
5577.0	1.539	
6609.0	1.598	
7832.0	1.653	
9281.0	1.705	
11000.0	1.753	
13030.0	1.796	
15450.0	1.834	
18310.0	1.865	
21690.0	1.89	
25710.0	1.907	
30460.0	1.916	
36100.0	1.916	
42780.0	1.907	
50700.0	1.889	
60090.0	1.861	
71210.0	1.824	
84380.0	1.778	
-----