pwiDB

Plasma-Surface Interaction Data Set 227

Sputtering of Ar⁺ on Ti(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Ti(pc) at 300 K

angle = 0.0 deg	E /eV	P
	25.02	0.0
	29.63	0.0001498
	35.1	0.0007383
	41.57	0.002153
	49.24	0.005057
	58.32	0.01051
	69.07	0.02013
	81.81	0.03613
	96.9	0.0612
	114.8	0.098
	135.9	0.1482
	161.0	0.2113
	190.7	0.2846
	225.9	0.3638
	267.5	0.4447
	316.8	0.5242
	375.3	0.6008
	444.5	0.6742
	526.4	0.745
	623.5	0.8139
	738.5	0.8815
	874.7	0.9484
	1036.0	1.015
	1227.0	1.082
	1453.0	1.148
	1721.0	1.214
	2039.0	1.28
	2415.0	1.346
	2860.0	1.41
	3388.0	1.473
	4012.0	1.534
	4752.0	1.592
	5629.0	1.648
	6667.0	1.7
	7896.0	1.748
	9353.0	1.792
	11080.0	1.829
	13120.0	1.861
	15540.0	1.886
	18410.0	1.903
	21800.0	1.913
	25820.0	1.914
	30580.0	1.906
	36220.0	1.889
	42900.0	1.862
	50810.0	1.827
	60180.0	1.782
	71280.0	1.728
	84430.0	1.667

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.3152
q = 4.896
mu = 1.829
epsilonL = 1.168e-05
Eth = 25.02

Fit range

E = 25.02 – 100000