{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ti", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Ar+ on Ti(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3152, "q": 4.896, "mu": 1.829, "epsilonL": 1.168e-05, "Eth": 25.02}, "E_min": 25.02, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
25.02	0.0	
29.63	0.0001498	
35.1	0.0007383	
41.57	0.002153	
49.24	0.005057	
58.32	0.01051	
69.07	0.02013	
81.81	0.03613	
96.9	0.0612	
114.8	0.098	
135.9	0.1482	
161.0	0.2113	
190.7	0.2846	
225.9	0.3638	
267.5	0.4447	
316.8	0.5242	
375.3	0.6008	
444.5	0.6742	
526.4	0.745	
623.5	0.8139	
738.5	0.8815	
874.7	0.9484	
1036.0	1.015	
1227.0	1.082	
1453.0	1.148	
1721.0	1.214	
2039.0	1.28	
2415.0	1.346	
2860.0	1.41	
3388.0	1.473	
4012.0	1.534	
4752.0	1.592	
5629.0	1.648	
6667.0	1.7	
7896.0	1.748	
9353.0	1.792	
11080.0	1.829	
13120.0	1.861	
15540.0	1.886	
18410.0	1.903	
21800.0	1.913	
25820.0	1.914	
30580.0	1.906	
36220.0	1.889	
42900.0	1.862	
50810.0	1.827	
60180.0	1.782	
71280.0	1.728	
84430.0	1.667	
-----