pwiDB

Plasma-Surface Interaction Data Set 226

Sputtering of Ne⁺ on Ti(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Ti(pc) at 300 K

angle = 0.0 deg	E /eV	P
	19.56	0.0
	23.29	0.0002361
	27.72	0.001156
	33.0	0.003355
	39.28	0.00782
	46.76	0.01604
	55.66	0.02998
	66.26	0.05182
	78.87	0.08322
	93.89	0.1243
	111.8	0.1733
	133.0	0.2267
	158.4	0.2809
	188.5	0.3335
	224.4	0.3831
	267.1	0.4296
	318.0	0.4735
	378.5	0.5153
	450.6	0.5556
	536.4	0.5948
	638.5	0.6333
	760.0	0.671
	904.7	0.708
	1077.0	0.7443
	1282.0	0.7797
	1526.0	0.814
	1817.0	0.8468
	2162.0	0.8781
	2574.0	0.9073
	3064.0	0.9342
	3647.0	0.9585
	4342.0	0.9796
	5168.0	0.9973
	6152.0	1.011
	7324.0	1.021
	8718.0	1.026
	10380.0	1.026
	12350.0	1.021
	14710.0	1.011
	17500.0	0.9959
	20840.0	0.9752
	24800.0	0.9493
	29530.0	0.9188
	35150.0	0.8838
	41840.0	0.845
	49800.0	0.8031
	59290.0	0.7587
	70570.0	0.7125
	84010.0	0.6654

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2317
q = 2.625
mu = 1.811
epsilonL = 2.944e-05
Eth = 19.56

Fit range

E = 19.56 – 100000