{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ti", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Ti(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2317, "q": 2.625, "mu": 1.811, "epsilonL": 2.944e-05, "Eth": 19.56}, "E_min": 19.56, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
19.56	0.0	
23.29	0.0002361	
27.72	0.001156	
33.0	0.003355	
39.28	0.00782	
46.76	0.01604	
55.66	0.02998	
66.26	0.05182	
78.87	0.08322	
93.89	0.1243	
111.8	0.1733	
133.0	0.2267	
158.4	0.2809	
188.5	0.3335	
224.4	0.3831	
267.1	0.4296	
318.0	0.4735	
378.5	0.5153	
450.6	0.5556	
536.4	0.5948	
638.5	0.6333	
760.0	0.671	
904.7	0.708	
1077.0	0.7443	
1282.0	0.7797	
1526.0	0.814	
1817.0	0.8468	
2162.0	0.8781	
2574.0	0.9073	
3064.0	0.9342	
3647.0	0.9585	
4342.0	0.9796	
5168.0	0.9973	
6152.0	1.011	
7324.0	1.021	
8718.0	1.026	
10380.0	1.026	
12350.0	1.021	
14710.0	1.011	
17500.0	0.9959	
20840.0	0.9752	
24800.0	0.9493	
29530.0	0.9188	
35150.0	0.8838	
41840.0	0.845	
49800.0	0.8031	
59290.0	0.7587	
70570.0	0.7125	
84010.0	0.6654	
-----