pwiDB

Plasma-Surface Interaction Data Set 225

Sputtering of N⁺ on Ti(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of N⁺ on Ti(pc) at 300 K

angle = 0.0 deg	E /eV	P
	16.54	0.0
	19.76	0.0001646
	23.6	0.000963
	28.19	0.003132
	33.67	0.00794
	40.22	0.01732
	48.04	0.03366
	57.38	0.059
	68.54	0.09355
	81.86	0.1349
	97.78	0.1788
	116.8	0.2216
	139.5	0.2611
	166.6	0.297
	199.0	0.3298
	237.8	0.3604
	284.0	0.3893
	339.2	0.4171
	405.2	0.4442
	484.0	0.4708
	578.1	0.4967
	690.5	0.5221
	824.8	0.5468
	985.2	0.5707
	1177.0	0.5935
	1406.0	0.6151
	1679.0	0.6351
	2005.0	0.6534
	2395.0	0.6696
	2861.0	0.6836
	3418.0	0.6949
	4082.0	0.7033
	4876.0	0.7086
	5824.0	0.7105
	6957.0	0.7089
	8310.0	0.7034
	9926.0	0.6942
	11860.0	0.6811
	14160.0	0.6643
	16920.0	0.644
	20200.0	0.6204
	24130.0	0.5939
	28830.0	0.565
	34430.0	0.5341
	41130.0	0.5019
	49130.0	0.4687
	58680.0	0.4352
	70090.0	0.4019
	83720.0	0.3692

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2321
q = 1.817
mu = 2.03
epsilonL = 4.818e-05
Eth = 16.54

Fit range

E = 16.54 – 100000