{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ti", "surface_phase": "pc", "species": {"text": "N+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of N+ on Ti(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2321, "q": 1.817, "mu": 2.03, "epsilonL": 4.818e-05, "Eth": 16.54}, "E_min": 16.54, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
16.54	0.0	
19.76	0.0001646	
23.6	0.000963	
28.19	0.003132	
33.67	0.00794	
40.22	0.01732	
48.04	0.03366	
57.38	0.059	
68.54	0.09355	
81.86	0.1349	
97.78	0.1788	
116.8	0.2216	
139.5	0.2611	
166.6	0.297	
199.0	0.3298	
237.8	0.3604	
284.0	0.3893	
339.2	0.4171	
405.2	0.4442	
484.0	0.4708	
578.1	0.4967	
690.5	0.5221	
824.8	0.5468	
985.2	0.5707	
1177.0	0.5935	
1406.0	0.6151	
1679.0	0.6351	
2005.0	0.6534	
2395.0	0.6696	
2861.0	0.6836	
3418.0	0.6949	
4082.0	0.7033	
4876.0	0.7086	
5824.0	0.7105	
6957.0	0.7089	
8310.0	0.7034	
9926.0	0.6942	
11860.0	0.6811	
14160.0	0.6643	
16920.0	0.644	
20200.0	0.6204	
24130.0	0.5939	
28830.0	0.565	
34430.0	0.5341	
41130.0	0.5019	
49130.0	0.4687	
58680.0	0.4352	
70090.0	0.4019	
83720.0	0.3692	
-----