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Plasma-Surface Interaction Data Set 224

Sputtering of 4He+ on Ti(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Ti(pc) at 300 K

angle = 0.0 deg E /eV P
24.540.0
29.070.0002479
34.450.001028
40.820.002621
48.360.005382
57.30.009608
67.90.01537
80.450.02236
95.330.02997
113.00.0375
133.80.04444
158.60.05053
187.90.05575
222.60.06019
263.80.06397
312.60.06721
370.40.06999
438.90.07239
520.00.07442
616.10.07613
730.00.0775
865.00.07853
1025.00.07921
1214.00.07953
1439.00.07948
1705.00.07903
2020.00.07819
2394.00.07696
2836.00.07534
3361.00.07334
3982.00.07099
4719.00.06833
5591.00.06538
6625.00.06221
7849.00.05886
9301.00.05537
11020.00.05182
13060.00.04823
15470.00.04468
18330.00.04118
21720.00.03779
25740.00.03452
30500.00.03141
36140.00.02848
42820.00.02572
50730.00.02315
60110.00.02078
71230.00.01859
84400.00.01659

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 24.54 – 100000