Return to search

Plasma-Surface Interaction Data Set 223

Sputtering of 3He+ on Ti(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Ti(pc) at 300 K

angle = 0.0 deg E /eV P
31.35.669e-21
36.910.0002963
43.510.0008182
51.30.001629
60.490.002819
71.310.004491
84.080.006736
99.130.009617
116.90.01314
137.80.01723
162.50.02173
191.60.02644
225.80.03113
266.30.03559
313.90.03968
370.10.04332
436.40.04646
514.50.04911
606.60.05129
715.20.05303
843.30.05436
994.20.05532
1172.00.05591
1382.00.05616
1629.00.05609
1921.00.05569
2265.00.05499
2670.00.054
3149.00.05274
3712.00.05121
4377.00.04946
5160.00.04749
6084.00.04536
7173.00.04309
8457.00.04071
9971.00.03827
11760.00.03579
13860.00.03331
16340.00.03085
19270.00.02845
22720.00.02613
26780.00.0239
31580.00.02178
37230.00.01978
43890.00.01791
51750.00.01616
61020.00.01454
71940.00.01304
84820.00.01167

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 31.3 – 100000