{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ti", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Ti(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3632, "q": 0.1456, "mu": 1.117, "epsilonL": 0.0002264, "Eth": 31.3}, "E_min": 31.3, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
31.3	5.669e-21	
36.91	0.0002963	
43.51	0.0008182	
51.3	0.001629	
60.49	0.002819	
71.31	0.004491	
84.08	0.006736	
99.13	0.009617	
116.9	0.01314	
137.8	0.01723	
162.5	0.02173	
191.6	0.02644	
225.8	0.03113	
266.3	0.03559	
313.9	0.03968	
370.1	0.04332	
436.4	0.04646	
514.5	0.04911	
606.6	0.05129	
715.2	0.05303	
843.3	0.05436	
994.2	0.05532	
1172.0	0.05591	
1382.0	0.05616	
1629.0	0.05609	
1921.0	0.05569	
2265.0	0.05499	
2670.0	0.054	
3149.0	0.05274	
3712.0	0.05121	
4377.0	0.04946	
5160.0	0.04749	
6084.0	0.04536	
7173.0	0.04309	
8457.0	0.04071	
9971.0	0.03827	
11760.0	0.03579	
13860.0	0.03331	
16340.0	0.03085	
19270.0	0.02845	
22720.0	0.02613	
26780.0	0.0239	
31580.0	0.02178	
37230.0	0.01978	
43890.0	0.01791	
51750.0	0.01616	
61020.0	0.01454	
71940.0	0.01304	
84820.0	0.01167	
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