Return to search

Plasma-Surface Interaction Data Set 222

Sputtering of T+ on Ti(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Ti(pc) at 300 K

angle = 0.0 deg E /eV P
29.340.0
34.640.0003503
40.890.0009775
48.280.001941
56.990.003318
67.280.005169
79.430.00751
93.780.01029
110.70.01338
130.70.01662
154.30.01981
182.20.02278
215.10.02544
253.90.02771
299.70.02958
353.90.03108
417.80.03222
493.20.03305
582.30.03358
687.40.03385
811.50.03388
958.10.03368
1131.00.03328
1335.00.03267
1576.00.03189
1861.00.03094
2197.00.02985
2594.00.02863
3062.00.0273
3615.00.02589
4268.00.02442
5039.00.02292
5949.00.02139
7023.00.01987
8291.00.01838
9788.00.01692
11560.00.01551
13640.00.01416
16110.00.01288
19010.00.01167
22450.00.01055
26500.00.009498
31290.00.00853
36940.00.00764
43600.00.006826
51480.00.006084
60770.00.005411
71750.00.004803
84700.00.004255

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 29.34 – 100000