{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ti", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of T+ on Ti(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3469, "q": 0.0887, "mu": 1.143, "epsilonL": 0.0004676, "Eth": 29.34}, "E_min": 29.34, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
29.34	0.0	
34.64	0.0003503	
40.89	0.0009775	
48.28	0.001941	
56.99	0.003318	
67.28	0.005169	
79.43	0.00751	
93.78	0.01029	
110.7	0.01338	
130.7	0.01662	
154.3	0.01981	
182.2	0.02278	
215.1	0.02544	
253.9	0.02771	
299.7	0.02958	
353.9	0.03108	
417.8	0.03222	
493.2	0.03305	
582.3	0.03358	
687.4	0.03385	
811.5	0.03388	
958.1	0.03368	
1131.0	0.03328	
1335.0	0.03267	
1576.0	0.03189	
1861.0	0.03094	
2197.0	0.02985	
2594.0	0.02863	
3062.0	0.0273	
3615.0	0.02589	
4268.0	0.02442	
5039.0	0.02292	
5949.0	0.02139	
7023.0	0.01987	
8291.0	0.01838	
9788.0	0.01692	
11560.0	0.01551	
13640.0	0.01416	
16110.0	0.01288	
19010.0	0.01167	
22450.0	0.01055	
26500.0	0.009498	
31290.0	0.00853	
36940.0	0.00764	
43600.0	0.006826	
51480.0	0.006084	
60770.0	0.005411	
71750.0	0.004803	
84700.0	0.004255	
-----