Return to search

Plasma-Surface Interaction Data Set 221

Sputtering of D+ on Ti(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Ti(pc) at 300 K

angle = 0.0 deg E /eV P
39.262.615e-25
46.070.0001848
54.070.0006213
63.460.001374
74.470.002519
87.40.004096
102.60.006077
120.40.008345
141.30.01072
165.80.01301
194.60.01508
228.30.01685
268.00.01829
314.50.01943
369.10.02029
433.10.02093
508.30.02136
596.50.02161
700.10.02171
821.60.02167
964.20.02151
1132.00.02122
1328.00.02082
1558.00.02032
1829.00.01973
2146.00.01905
2519.00.01829
2956.00.01748
3469.00.01662
4072.00.01572
4778.00.01479
5608.00.01386
6581.00.01292
7724.00.012
9064.00.01109
10640.00.01021
12480.00.009369
14650.00.008564
17190.00.007802
20180.00.007085
23680.00.006416
27790.00.005793
32620.00.005217
38280.00.004687
44920.00.004202
52720.00.003758
61870.00.003355
72610.00.002989
85210.00.002659

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 39.26 – 100000