{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ti", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Ti(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3491, "q": 0.0565, "mu": 1.396, "epsilonL": 0.0004771, "Eth": 39.26}, "E_min": 39.26, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
39.26	2.615e-25	
46.07	0.0001848	
54.07	0.0006213	
63.46	0.001374	
74.47	0.002519	
87.4	0.004096	
102.6	0.006077	
120.4	0.008345	
141.3	0.01072	
165.8	0.01301	
194.6	0.01508	
228.3	0.01685	
268.0	0.01829	
314.5	0.01943	
369.1	0.02029	
433.1	0.02093	
508.3	0.02136	
596.5	0.02161	
700.1	0.02171	
821.6	0.02167	
964.2	0.02151	
1132.0	0.02122	
1328.0	0.02082	
1558.0	0.02032	
1829.0	0.01973	
2146.0	0.01905	
2519.0	0.01829	
2956.0	0.01748	
3469.0	0.01662	
4072.0	0.01572	
4778.0	0.01479	
5608.0	0.01386	
6581.0	0.01292	
7724.0	0.012	
9064.0	0.01109	
10640.0	0.01021	
12480.0	0.009369	
14650.0	0.008564	
17190.0	0.007802	
20180.0	0.007085	
23680.0	0.006416	
27790.0	0.005793	
32620.0	0.005217	
38280.0	0.004687	
44920.0	0.004202	
52720.0	0.003758	
61870.0	0.003355	
72610.0	0.002989	
85210.0	0.002659	
-----