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Plasma-Surface Interaction Data Set 220

Sputtering of H+ on Ti(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Ti(pc) at 300 K

angle = 0.0 deg E /eV P
77.180.0
89.330.0001483
103.40.0003426
119.70.0005987
138.50.0009269
160.40.001334
185.60.00182
214.80.002378
248.70.002992
287.90.003639
333.20.00429
385.70.004915
446.40.005489
516.70.005992
598.10.006411
692.30.006742
801.30.006985
927.50.007144
1074.00.007226
1243.00.007238
1438.00.007188
1665.00.007084
1927.00.006934
2231.00.006744
2582.00.006521
2989.00.006271
3460.00.006
4004.00.005712
4635.00.005414
5365.00.005109
6210.00.004801
7188.00.004494
8320.00.004191
9631.00.003894
11150.00.003607
12900.00.00333
14940.00.003065
17290.00.002814
20010.00.002576
23160.00.002353
26810.00.002144
31030.00.001949
35920.00.001768
41580.00.001601
48130.00.001447
55710.00.001305
64480.00.001176
74640.00.001058
86390.00.0009499

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 77.18 – 100000