pwiDB

Plasma-Surface Interaction Data Set 219

Sputtering of Sc⁺ on Sc(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Sc⁺ on Sc(pc) at 300 K

angle = 0.0 deg	E /eV	P
	16.8	0.0
	20.07	0.0001237
	23.96	0.0005804
	28.61	0.001651
	34.16	0.003823
	40.79	0.007894
	48.71	0.0151
	58.16	0.02721
	69.45	0.04655
	82.93	0.07574
	99.02	0.1171
	118.2	0.1714
	141.2	0.2379
	168.6	0.3135
	201.3	0.3943
	240.4	0.4768
	287.0	0.5589
	342.7	0.6394
	409.3	0.7185
	488.7	0.7965
	583.5	0.8741
	696.8	0.9519
	832.0	1.03
	993.5	1.109
	1186.0	1.19
	1417.0	1.271
	1691.0	1.353
	2020.0	1.435
	2412.0	1.517
	2880.0	1.599
	3439.0	1.68
	4106.0	1.759
	4903.0	1.835
	5854.0	1.909
	6991.0	1.979
	8347.0	2.044
	9967.0	2.104
	11900.0	2.157
	14210.0	2.203
	16970.0	2.241
	20260.0	2.27
	24200.0	2.288
	28890.0	2.296
	34500.0	2.293
	41190.0	2.277
	49190.0	2.249
	58740.0	2.209
	70140.0	2.157
	83750.0	2.093

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.3163
q = 5.872
mu = 1.745
epsilonL = 9.454e-06
Eth = 16.8

Fit range

E = 16.8 – 100000