{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Sc", "surface_phase": "pc", "species": {"text": "Sc+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Sc+ on Sc(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3163, "q": 5.872, "mu": 1.745, "epsilonL": 9.454e-06, "Eth": 16.8}, "E_min": 16.8, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
16.8	0.0	
20.07	0.0001237	
23.96	0.0005804	
28.61	0.001651	
34.16	0.003823	
40.79	0.007894	
48.71	0.0151	
58.16	0.02721	
69.45	0.04655	
82.93	0.07574	
99.02	0.1171	
118.2	0.1714	
141.2	0.2379	
168.6	0.3135	
201.3	0.3943	
240.4	0.4768	
287.0	0.5589	
342.7	0.6394	
409.3	0.7185	
488.7	0.7965	
583.5	0.8741	
696.8	0.9519	
832.0	1.03	
993.5	1.109	
1186.0	1.19	
1417.0	1.271	
1691.0	1.353	
2020.0	1.435	
2412.0	1.517	
2880.0	1.599	
3439.0	1.68	
4106.0	1.759	
4903.0	1.835	
5854.0	1.909	
6991.0	1.979	
8347.0	2.044	
9967.0	2.104	
11900.0	2.157	
14210.0	2.203	
16970.0	2.241	
20260.0	2.27	
24200.0	2.288	
28890.0	2.296	
34500.0	2.293	
41190.0	2.277	
49190.0	2.249	
58740.0	2.209	
70140.0	2.157	
83750.0	2.093	
-----