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Plasma-Surface Interaction Data Set 218

Sputtering of Ca+ on Ca(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ca+ on Ca(pc) at 300 K

angle = 0.0 deg E /eV P
10.685.885e-27
12.870.0005136
15.510.002051
18.690.00526
22.530.01119
27.150.02133
32.720.03756
39.440.06195
47.530.09621
57.280.1411
69.030.1961
83.190.2593
100.30.3283
120.80.4006
145.60.4748
175.50.5499
211.50.626
254.90.7032
307.20.7819
370.20.8625
446.20.9453
537.81.031
648.11.119
781.11.209
941.31.302
1134.01.397
1367.01.493
1648.01.591
1986.01.689
2393.01.787
2884.01.884
3476.01.98
4189.02.073
5049.02.162
6085.02.247
7333.02.326
8838.02.398
10650.02.462
12840.02.517
15470.02.561
18640.02.594
22470.02.613
27080.02.619
32640.02.611
39330.02.587
47400.02.547
57130.02.492
68850.02.423
82980.02.339

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 10.68 – 100000