{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ca", "surface_phase": "pc", "species": {"text": "Ca+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ca+ on Ca(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0968, "q": 6.698, "mu": 1.528, "epsilonL": 1.059e-05, "Eth": 10.68}, "E_min": 10.68, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
10.68	5.885e-27	
12.87	0.0005136	
15.51	0.002051	
18.69	0.00526	
22.53	0.01119	
27.15	0.02133	
32.72	0.03756	
39.44	0.06195	
47.53	0.09621	
57.28	0.1411	
69.03	0.1961	
83.19	0.2593	
100.3	0.3283	
120.8	0.4006	
145.6	0.4748	
175.5	0.5499	
211.5	0.626	
254.9	0.7032	
307.2	0.7819	
370.2	0.8625	
446.2	0.9453	
537.8	1.031	
648.1	1.119	
781.1	1.209	
941.3	1.302	
1134.0	1.397	
1367.0	1.493	
1648.0	1.591	
1986.0	1.689	
2393.0	1.787	
2884.0	1.884	
3476.0	1.98	
4189.0	2.073	
5049.0	2.162	
6085.0	2.247	
7333.0	2.326	
8838.0	2.398	
10650.0	2.462	
12840.0	2.517	
15470.0	2.561	
18640.0	2.594	
22470.0	2.613	
27080.0	2.619	
32640.0	2.611	
39330.0	2.587	
47400.0	2.547	
57130.0	2.492	
68850.0	2.423	
82980.0	2.339	
-----