pwiDB

Plasma-Surface Interaction Data Set 216

Sputtering of Kr⁺ on Si(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Si(pc) at 300 K

angle = 0.0 deg	E /eV	P
	39.58	0.0
	46.44	0.000109
	54.5	0.000502
	63.95	0.001394
	75.03	0.003144
	88.04	0.006321
	103.3	0.01178
	121.2	0.02077
	142.2	0.03493
	166.9	0.05627
	195.8	0.08687
	229.8	0.1284
	269.6	0.1814
	316.4	0.2449
	371.2	0.3167
	435.6	0.3936
	511.1	0.4726
	599.7	0.5518
	703.7	0.6299
	825.7	0.7066
	968.9	0.7821
	1137.0	0.857
	1334.0	0.9316
	1565.0	1.007
	1837.0	1.082
	2155.0	1.159
	2529.0	1.236
	2967.0	1.314
	3482.0	1.393
	4085.0	1.473
	4794.0	1.553
	5625.0	1.634
	6600.0	1.714
	7744.0	1.793
	9087.0	1.871
	10660.0	1.947
	12510.0	2.021
	14680.0	2.092
	17230.0	2.159
	20210.0	2.222
	23720.0	2.28
	27830.0	2.333
	32650.0	2.379
	38310.0	2.418
	44960.0	2.449
	52750.0	2.472
	61900.0	2.486
	72630.0	2.49
	85220.0	2.483

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.3
q = 6.366
mu = 1.764
epsilonL = 3.964e-06
Eth = 39.58

Fit range

E = 39.58 – 100000