pwiDB

Plasma-Surface Interaction Data Set 214

Sputtering of Si⁺ on Si(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Si⁺ on Si(pc) at 300 K

angle = 0.0 deg	E /eV	P
	20.03	0.0
	23.84	7.684e-05
	28.36	0.0003621
	33.75	0.001031
	40.15	0.002389
	47.77	0.00494
	56.84	0.009475
	67.62	0.01717
	80.46	0.02965
	95.73	0.04888
	113.9	0.07683
	135.5	0.1148
	161.2	0.1624
	191.8	0.2178
	228.3	0.2774
	271.6	0.3378
	323.1	0.3963
	384.5	0.4515
	457.4	0.503
	544.2	0.5513
	647.5	0.5968
	770.4	0.6401
	916.7	0.6816
	1091.0	0.7216
	1298.0	0.7602
	1544.0	0.7975
	1837.0	0.8333
	2186.0	0.8674
	2600.0	0.8998
	3094.0	0.93
	3681.0	0.9578
	4380.0	0.9828
	5211.0	1.005
	6200.0	1.023
	7377.0	1.037
	8777.0	1.048
	10440.0	1.053
	12430.0	1.054
	14780.0	1.049
	17590.0	1.039
	20930.0	1.024
	24900.0	1.003
	29630.0	0.9766
	35250.0	0.9456
	41940.0	0.9101
	49900.0	0.8707
	59370.0	0.828
	70640.0	0.7827
	84050.0	0.7356

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.6726
q = 2.695
mu = 1.758
epsilonL = 2.435e-05
Eth = 20.04

Fit range

E = 20.04 – 100000