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Plasma-Surface Interaction Data Set 210

Sputtering of ³He⁺ on Si(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of ³He⁺ on Si(pc) at 300 K

angle = 0.0 deg	E /eV	P
	21.41	0.0
	25.43	0.0003432
	30.22	0.001188
	35.91	0.002718
	42.66	0.00518
	50.69	0.008798
	60.23	0.01368
	71.57	0.0197
	85.04	0.02651
	101.0	0.03358
	120.1	0.0404
	142.7	0.0466
	169.5	0.05199
	201.4	0.05653
	239.3	0.06029
	284.3	0.06336
	337.8	0.06581
	401.4	0.06773
	477.0	0.06917
	566.7	0.07016
	673.4	0.07074
	800.1	0.0709
	950.7	0.07066
	1130.0	0.07003
	1342.0	0.06901
	1595.0	0.06762
	1895.0	0.06587
	2252.0	0.06378
	2675.0	0.06139
	3179.0	0.05874
	3777.0	0.05587
	4488.0	0.05282
	5332.0	0.04966
	6336.0	0.04642
	7528.0	0.04316
	8945.0	0.03993
	10630.0	0.03675
	12630.0	0.03366
	15010.0	0.0307
	17830.0	0.02789
	21180.0	0.02523
	25170.0	0.02274
	29910.0	0.02043
	35540.0	0.01829
	42220.0	0.01633
	50170.0	0.01454
	59610.0	0.01291
	70830.0	0.01144
	84160.0	0.01011

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.3065
q = 0.1823
mu = 1.395
epsilonL = 0.0003858
Eth = 21.41

Fit range

E = 21.41 – 100000