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Plasma-Surface Interaction Data Set 209

Sputtering of T+ on Si(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Si(pc) at 300 K

angle = 0.0 deg E /eV P
21.30.0
25.310.0005038
30.070.0012
35.740.002167
42.470.003462
50.470.00513
59.970.007183
71.260.009589
84.680.01227
100.60.0151
119.60.01793
142.10.02062
168.90.02306
200.70.02517
238.40.02691
283.30.02826
336.70.02926
400.10.0299
475.50.03023
565.00.03027
671.40.03004
797.80.02958
948.10.0289
1127.00.02804
1339.00.02702
1591.00.02586
1890.00.02459
2246.00.02324
2670.00.02183
3172.00.02039
3770.00.01894
4479.00.0175
5323.00.01609
6325.00.01473
7517.00.01342
8932.00.01217
10610.00.011
12610.00.009909
14990.00.008893
17810.00.007957
21160.00.007098
25150.00.006314
29890.00.005603
35510.00.00496
42200.00.004382
50150.00.003862
59590.00.003398
70820.00.002985
84150.00.002617

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 21.3 – 100000