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Plasma-Surface Interaction Data Set 208

Sputtering of D+ on Si(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Si(pc) at 300 K

angle = 0.0 deg E /eV P
24.540.0
29.089.527e-05
34.460.0004021
40.830.001038
48.380.002147
57.320.003849
67.920.006147
80.470.008871
95.350.01171
113.00.01436
133.90.0166
158.60.01836
187.90.01969
222.70.02064
263.90.02129
312.60.02169
370.40.02188
438.90.02191
520.10.02178
616.20.02151
730.20.02111
865.20.02059
1025.00.01997
1215.00.01925
1439.00.01845
1705.00.01758
2021.00.01666
2394.00.01569
2837.00.0147
3361.00.0137
3983.00.0127
4719.00.01172
5591.00.01077
6625.00.009847
7850.00.008968
9301.00.008136
11020.00.007354
13060.00.006625
15470.00.00595
18330.00.005327
21720.00.004757
25740.00.004236
30500.00.003764
36140.00.003337
42820.00.002952
50730.00.002606
60110.00.002297
71230.00.002021
84400.00.001775

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 24.54 – 100000