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Plasma-Surface Interaction Data Set 206

Sputtering of Xe+ on Al(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe+ on Al(pc) at 300 K

angle = 0.0 deg E /eV P
37.382.27e-34
43.918.228e-05
51.590.0004491
60.60.00139
71.190.003406
83.630.007332
98.250.01448
115.40.02679
135.60.04686
159.30.0777
187.10.1221
219.80.1813
258.20.2548
303.30.3394
356.40.431
418.60.5257
491.80.6211
577.70.7161
678.70.8108
797.30.9059
936.61.002
1100.01.101
1293.01.203
1518.01.309
1784.01.418
2096.01.533
2462.01.651
2892.01.775
3397.01.903
3991.02.036
4688.02.172
5508.02.313
6470.02.457
7601.02.603
8929.02.752
10490.02.902
12320.03.053
14480.03.203
17010.03.353
19980.03.5
23470.03.644
27570.03.784
32390.03.919
38050.04.046
44700.04.166
52510.04.277
61680.04.377
72460.04.465
85120.04.539

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 37.38 – 100000