pwiDB

Plasma-Surface Interaction Data Set 205

Sputtering of Kr⁺ on Al(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Al(pc) at 300 K

angle = 0.0 deg	E /eV	P
	28.61	3.527e-34
	33.79	8.28e-05
	39.91	0.0004518
	47.14	0.001404
	55.68	0.003463
	65.77	0.007513
	77.69	0.01496
	91.76	0.02792
	108.4	0.04923
	128.0	0.08218
	151.2	0.1297
	178.6	0.1931
	211.0	0.2709
	249.2	0.3594
	294.4	0.4535
	347.7	0.549
	410.7	0.6433
	485.1	0.7358
	573.0	0.8265
	676.8	0.9165
	799.5	1.007
	944.3	1.098
	1115.0	1.191
	1317.0	1.286
	1556.0	1.384
	1838.0	1.484
	2171.0	1.586
	2565.0	1.691
	3029.0	1.798
	3578.0	1.907
	4226.0	2.017
	4992.0	2.127
	5897.0	2.237
	6965.0	2.347
	8227.0	2.455
	9718.0	2.561
	11480.0	2.664
	13560.0	2.762
	16010.0	2.856
	18920.0	2.944
	22340.0	3.025
	26390.0	3.098
	31170.0	3.162
	36820.0	3.215
	43490.0	3.257
	51370.0	3.287
	60680.0	3.303
	71670.0	3.306
	84660.0	3.293

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.3085
q = 8.455
mu = 1.965
epsilonL = 4.177e-06
Eth = 28.61

Fit range

E = 28.61 – 100000