{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Al", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Al(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3085, "q": 8.455, "mu": 1.965, "epsilonL": 4.177e-06, "Eth": 28.61}, "E_min": 28.61, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
28.61	3.527e-34	
33.79	8.28e-05	
39.91	0.0004518	
47.14	0.001404	
55.68	0.003463	
65.77	0.007513	
77.69	0.01496	
91.76	0.02792	
108.4	0.04923	
128.0	0.08218	
151.2	0.1297	
178.6	0.1931	
211.0	0.2709	
249.2	0.3594	
294.4	0.4535	
347.7	0.549	
410.7	0.6433	
485.1	0.7358	
573.0	0.8265	
676.8	0.9165	
799.5	1.007	
944.3	1.098	
1115.0	1.191	
1317.0	1.286	
1556.0	1.384	
1838.0	1.484	
2171.0	1.586	
2565.0	1.691	
3029.0	1.798	
3578.0	1.907	
4226.0	2.017	
4992.0	2.127	
5897.0	2.237	
6965.0	2.347	
8227.0	2.455	
9718.0	2.561	
11480.0	2.664	
13560.0	2.762	
16010.0	2.856	
18920.0	2.944	
22340.0	3.025	
26390.0	3.098	
31170.0	3.162	
36820.0	3.215	
43490.0	3.257	
51370.0	3.287	
60680.0	3.303	
71670.0	3.306	
84660.0	3.293	
-----