pwiDB

Plasma-Surface Interaction Data Set 204

Sputtering of Ar⁺ on Al(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Al(pc) at 300 K

angle = 0.0 deg	E /eV	P
	21.55	0.0
	25.6	7.858e-05
	30.42	0.0004753
	36.13	0.001584
	42.93	0.00413
	51.0	0.009389
	60.59	0.01944
	71.98	0.03738
	85.52	0.06712
	101.6	0.1124
	120.7	0.175
	143.4	0.2528
	170.4	0.34
	202.4	0.4296
	240.5	0.5166
	285.7	0.5984
	339.4	0.6749
	403.2	0.7472
	479.0	0.8165
	569.1	0.884
	676.1	0.9505
	803.2	1.017
	954.2	1.083
	1134.0	1.149
	1347.0	1.214
	1600.0	1.28
	1901.0	1.344
	2258.0	1.408
	2683.0	1.469
	3187.0	1.529
	3787.0	1.586
	4499.0	1.64
	5345.0	1.69
	6350.0	1.735
	7544.0	1.775
	8962.0	1.81
	10650.0	1.837
	12650.0	1.858
	15030.0	1.87
	17850.0	1.874
	21210.0	1.87
	25200.0	1.855
	29940.0	1.832
	35570.0	1.799
	42250.0	1.756
	50200.0	1.705
	59640.0	1.646
	70850.0	1.579
	84170.0	1.506

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.4713
q = 4.793
mu = 2.081
epsilonL = 1.592e-05
Eth = 21.55

Fit range

E = 21.55 – 100000