{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Al", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Al(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4713, "q": 4.793, "mu": 2.081, "epsilonL": 1.592e-05, "Eth": 21.55}, "E_min": 21.55, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
21.55	0.0	
25.6	7.858e-05	
30.42	0.0004753	
36.13	0.001584	
42.93	0.00413	
51.0	0.009389	
60.59	0.01944	
71.98	0.03738	
85.52	0.06712	
101.6	0.1124	
120.7	0.175	
143.4	0.2528	
170.4	0.34	
202.4	0.4296	
240.5	0.5166	
285.7	0.5984	
339.4	0.6749	
403.2	0.7472	
479.0	0.8165	
569.1	0.884	
676.1	0.9505	
803.2	1.017	
954.2	1.083	
1134.0	1.149	
1347.0	1.214	
1600.0	1.28	
1901.0	1.344	
2258.0	1.408	
2683.0	1.469	
3187.0	1.529	
3787.0	1.586	
4499.0	1.64	
5345.0	1.69	
6350.0	1.735	
7544.0	1.775	
8962.0	1.81	
10650.0	1.837	
12650.0	1.858	
15030.0	1.87	
17850.0	1.874	
21210.0	1.87	
25200.0	1.855	
29940.0	1.832	
35570.0	1.799	
42250.0	1.756	
50200.0	1.705	
59640.0	1.646	
70850.0	1.579	
84170.0	1.506	
-----