pwiDB

Plasma-Surface Interaction Data Set 203

Sputtering of Al⁺ on Al(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Al⁺ on Al(pc) at 300 K

angle = 0.0 deg	E /eV	P
	16.1	0.0
	19.24	9.135e-05
	22.99	0.0005068
	27.48	0.001606
	32.84	0.004045
	39.24	0.008957
	46.9	0.01819
	56.05	0.03448
	66.99	0.06138
	80.06	0.1026
	95.69	0.1601
	114.4	0.233
	136.7	0.3164
	163.3	0.4036
	195.2	0.489
	233.3	0.5694
	278.8	0.6439
	333.2	0.7132
	398.3	0.7784
	476.0	0.8408
	568.8	0.9011
	679.8	0.9598
	812.5	1.017
	971.0	1.074
	1160.0	1.129
	1387.0	1.182
	1658.0	1.234
	1981.0	1.283
	2368.0	1.329
	2830.0	1.373
	3382.0	1.412
	4042.0	1.447
	4830.0	1.476
	5773.0	1.5
	6899.0	1.518
	8245.0	1.529
	9854.0	1.532
	11780.0	1.528
	14070.0	1.515
	16820.0	1.495
	20100.0	1.465
	24030.0	1.428
	28710.0	1.384
	34320.0	1.332
	41010.0	1.274
	49020.0	1.211
	58580.0	1.143
	70010.0	1.073
	83670.0	1.001

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.6008
q = 3.918
mu = 1.955
epsilonL = 2.895e-05
Eth = 16.1

Fit range

E = 16.1 – 100000