{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Al", "surface_phase": "pc", "species": {"text": "Al+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Al+ on Al(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.6008, "q": 3.918, "mu": 1.955, "epsilonL": 2.895e-05, "Eth": 16.1}, "E_min": 16.1, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
16.1	0.0	
19.24	9.135e-05	
22.99	0.0005068	
27.48	0.001606	
32.84	0.004045	
39.24	0.008957	
46.9	0.01819	
56.05	0.03448	
66.99	0.06138	
80.06	0.1026	
95.69	0.1601	
114.4	0.233	
136.7	0.3164	
163.3	0.4036	
195.2	0.489	
233.3	0.5694	
278.8	0.6439	
333.2	0.7132	
398.3	0.7784	
476.0	0.8408	
568.8	0.9011	
679.8	0.9598	
812.5	1.017	
971.0	1.074	
1160.0	1.129	
1387.0	1.182	
1658.0	1.234	
1981.0	1.283	
2368.0	1.329	
2830.0	1.373	
3382.0	1.412	
4042.0	1.447	
4830.0	1.476	
5773.0	1.5	
6899.0	1.518	
8245.0	1.529	
9854.0	1.532	
11780.0	1.528	
14070.0	1.515	
16820.0	1.495	
20100.0	1.465	
24030.0	1.428	
28710.0	1.384	
34320.0	1.332	
41010.0	1.274	
49020.0	1.211	
58580.0	1.143	
70010.0	1.073	
83670.0	1.001	
-----