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Plasma-Surface Interaction Data Set 202

Sputtering of Ne⁺ on Al(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Al(pc) at 300 K

angle = 0.0 deg	E /eV	P
	16.9	0.0
	20.18	0.0002601
	24.1	0.001213
	28.77	0.003427
	34.35	0.007868
	41.01	0.01604
	48.96	0.03009
	58.46	0.05272
	69.8	0.0867
	83.33	0.1338
	99.49	0.1938
	118.8	0.2635
	141.8	0.3383
	169.3	0.4131
	202.2	0.4847
	241.4	0.5515
	288.2	0.6132
	344.1	0.6705
	410.8	0.7241
	490.5	0.7748
	585.6	0.823
	699.1	0.8693
	834.7	0.9136
	996.6	0.956
	1190.0	0.9963
	1421.0	1.034
	1696.0	1.07
	2025.0	1.102
	2418.0	1.131
	2887.0	1.156
	3447.0	1.177
	4115.0	1.194
	4913.0	1.205
	5866.0	1.21
	7003.0	1.209
	8361.0	1.202
	9983.0	1.189
	11920.0	1.169
	14230.0	1.143
	16990.0	1.111
	20290.0	1.073
	24220.0	1.029
	28920.0	0.9816
	34520.0	0.9303
	41220.0	0.8763
	49210.0	0.8204
	58760.0	0.7637
	70150.0	0.7069
	83760.0	0.6508

Fit Function: SPTEEX

Y (E) = \frac{q}{2} \frac{{(\frac{E}{E_{th}} - 1)}^{μ} \ln (1 + 1.2288 ϵ)}{λ + {(\frac{E}{E_{th}} - 1)}^{μ} [ϵ + 0.1728 \sqrt{ϵ} + 0.008 ϵ^{0.1504}]}

Coefficients

lambda = 0.3813
q = 3.095
mu = 1.739
epsilonL = 4.49e-05
Eth = 16.9

Fit range

E = 16.9 – 100000