{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Al", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Al(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3813, "q": 3.095, "mu": 1.739, "epsilonL": 4.49e-05, "Eth": 16.9}, "E_min": 16.9, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
16.9	0.0	
20.18	0.0002601	
24.1	0.001213	
28.77	0.003427	
34.35	0.007868	
41.01	0.01604	
48.96	0.03009	
58.46	0.05272	
69.8	0.0867	
83.33	0.1338	
99.49	0.1938	
118.8	0.2635	
141.8	0.3383	
169.3	0.4131	
202.2	0.4847	
241.4	0.5515	
288.2	0.6132	
344.1	0.6705	
410.8	0.7241	
490.5	0.7748	
585.6	0.823	
699.1	0.8693	
834.7	0.9136	
996.6	0.956	
1190.0	0.9963	
1421.0	1.034	
1696.0	1.07	
2025.0	1.102	
2418.0	1.131	
2887.0	1.156	
3447.0	1.177	
4115.0	1.194	
4913.0	1.205	
5866.0	1.21	
7003.0	1.209	
8361.0	1.202	
9983.0	1.189	
11920.0	1.169	
14230.0	1.143	
16990.0	1.111	
20290.0	1.073	
24220.0	1.029	
28920.0	0.9816	
34520.0	0.9303	
41220.0	0.8763	
49210.0	0.8204	
58760.0	0.7637	
70150.0	0.7069	
83760.0	0.6508	
-----