pwiDB

Plasma-Surface Interaction Data Set 201

Sputtering of N⁺ on Al(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of N⁺ on Al(pc) at 300 K

angle = 0.0 deg	E /eV	P
	13.61	0.0
	16.32	0.0002534
	19.58	0.001244
	23.48	0.003637
	28.15	0.008555
	33.76	0.01771
	40.49	0.03342
	48.55	0.05817
	58.22	0.0937
	69.82	0.1398
	83.73	0.1935
	100.4	0.2504
	120.4	0.3063
	144.4	0.3585
	173.2	0.4061
	207.7	0.4492
	249.1	0.4887
	298.7	0.5252
	358.2	0.5594
	429.5	0.5918
	515.1	0.6224
	617.7	0.6515
	740.8	0.6788
	888.4	0.7044
	1065.0	0.728
	1278.0	0.7492
	1532.0	0.768
	1837.0	0.7838
	2203.0	0.7964
	2642.0	0.8055
	3169.0	0.8108
	3800.0	0.8119
	4557.0	0.8087
	5465.0	0.801
	6554.0	0.7887
	7860.0	0.7718
	9425.0	0.7506
	11300.0	0.7252
	13560.0	0.6962
	16260.0	0.6639
	19490.0	0.6289
	23380.0	0.5919
	28040.0	0.5536
	33620.0	0.5146
	40320.0	0.4756
	48350.0	0.437
	57980.0	0.3994
	69530.0	0.3632
	83390.0	0.3287

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.3513
q = 2.076
mu = 1.796
epsilonL = 7.764e-05
Eth = 13.61

Fit range

E = 13.61 – 100000